| 
 | 27 |  | 2021 | 45,00 Mio. € |
|  | 29 |  | 2024 | 23,00 Mio. € |
|  | 23 |  | 2024 | 23,00 Mio. € |
| 
 | 29 |  | 2024 | 15,00 Mio. € |
|  | 30 |  | 2022 | 15,00 Mio. € |
| 
 | 21 |  | 2025 | 14,00 Mio. € |
| 
 | 24 |  | 2024 | 10,00 Mio. € |
|  | 29 |  | 2024 | 9,00 Mio. € |
|  | 29 |  | 2021 | 7,50 Mio. € |
|  | 22 |  | 2021 | 7,00 Mio. € |
| 
 | 19 |  | 2025 | 7,00 Mio. € |
|  | 31 |  | 2023 | 6,00 Mio. € |
|  | 26 |  | 2021 | 6,00 Mio. € |
|  | 27 |  | 2022 | 6,00 Mio. € |
| 
 | 28 |  | - | 6,00 Mio. € |
|  | 31 |  | 2021 | 5,00 Mio. € |
|  | 21 |  | 2021 | 5,00 Mio. € |
| 
 | 26 |  | 2023 | 5,00 Mio. € |
| 
 | 27 |  | 2021 | 5,00 Mio. € |
| 
 | 24 |  | 2024 | 4,50 Mio. € |
|  | 22 |  | 2022 | 4,00 Mio. € |
| 
 | 22 |  | - | 4,00 Mio. € |
| 
 | 21 |  | 2023 | 4,00 Mio. € |
|  | 22 |  | 2022 | 4,00 Mio. € |
| 
 | 24 |  | 2021 | 3,50 Mio. € |
|  | 30 |  | 2024 | 3,50 Mio. € |
| 
 | 27 |  | 2025 | 3,20 Mio. € |
|  | 24 |  | 2022 | 3,00 Mio. € |
| 
 | 21 |  | 2024 | 3,00 Mio. € |
|  | 33 |  | 2021 | 3,00 Mio. € |
| 
 | 28 |  | 2022 | 3,00 Mio. € |
| 
 | 27 |  | 2023 | 3,00 Mio. € |
|  | 30 |  | 2022 | 2,60 Mio. € |
|  | 24 |  | 2021 | 2,50 Mio. € |
| 
 | 31 |  | 2023 | 2,50 Mio. € |
|  | 26 |  | 2021 | 2,20 Mio. € |
|  | 27 |  | - | 2,00 Mio. € |
|  | 24 |  | 2022 | 2,00 Mio. € |
|  | 24 |  | 2024 | 2,00 Mio. € |
|  | 25 |  | 2021 | 2,00 Mio. € |
| 
 | 20 |  | 2021 | 2,00 Mio. € |
|  | 33 |  | 2022 | 2,00 Mio. € |
|  | 25 |  | 2023 | 2,00 Mio. € |
|  | 24 |  | 2023 | 2,00 Mio. € |
|  | 28 |  | 2024 | 2,00 Mio. € |
| 
 | 32 |  | 2021 | 1,80 Mio. € |
| 
 | 25 |  | 2023 | 1,70 Mio. € |
| 
 | 30 |  | 2021 | 1,60 Mio. € |
| 
 | 24 |  | 2023 | 1,50 Mio. € |
| 
 | 24 |  | 2023 | 1,50 Mio. € |
|  | 29 |  | 2025 | 1,50 Mio. € |
|  | 23 |  | 2024 | 1,50 Mio. € |
| 
 | 30 |  | 2021 | 1,50 Mio. € |
| 
 | 28 |  | 2022 | 1,50 Mio. € |
|  | 22 |  | 2023 | 1,30 Mio. € |
| 
 | 23 |  | 2024 | 1,30 Mio. € |
| 
 | 29 |  | 2021 | 1,20 Mio. € |
|  | 28 |  | 2021 | 1,20 Mio. € |
|  | 20 |  | 2021 | 1,00 Mio. € |
|  | 26 |  | 2022 | 1,00 Mio. € |
|  | 30 |  | 2023 | 950 Tsd. € |
|  | 27 |  | 2023 | 950 Tsd. € |
|  | 23 |  | 2023 | 900 Tsd. € |
|  | 21 |  | 2021 | 900 Tsd. € |
| 
 | 23 |  | 2022 | 900 Tsd. € |
|  | 30 |  | 2023 | 900 Tsd. € |
| 
 | 31 |  | 2023 | 900 Tsd. € |
|  | 27 |  | 2021 | 800 Tsd. € |
|  | 32 |  | - | 800 Tsd. € |
| 
 | 25 |  | 2022 | 800 Tsd. € |
|  | 29 |  | 2021 | 800 Tsd. € |
| 
 | 25 |  | 2022 | 800 Tsd. € |
|  | 25 |  | 2023 | 800 Tsd. € |
|  | 25 |  | 2022 | 750 Tsd. € |
|  | 23 |  | 2023 | 725 Tsd. € |
| 
 | 22 |  | 2021 | 725 Tsd. € |
|  | 25 |  | 2021 | 700 Tsd. € |
|  | 23 |  | 2022 | 700 Tsd. € |
| 
 | 33 |  | 2021 | 700 Tsd. € |
|  | 20 |  | 2023 | 700 Tsd. € |
|  | 22 |  | 2024 | 700 Tsd. € |
|  | 31 |  | 2023 | 650 Tsd. € |
| 
 | 30 |  | 2020 | 600 Tsd. € |
|  | 25 |  | 2023 | 600 Tsd. € |
|  | 25 |  | 2024 | 600 Tsd. € |
|  | 24 |  | 2021 | 600 Tsd. € |
|  | 20 |  | 2025 | 600 Tsd. € |
|  | 28 |  | 2022 | 600 Tsd. € |
|  | 24 |  | 2023 | 600 Tsd. € |
|  | 23 |  | 2022 | 600 Tsd. € |
| 
 | 22 |  | 2023 | 600 Tsd. € |
| 
 | 23 |  | 2021 | 600 Tsd. € |
| 
 | 21 |  | 2021 | 600 Tsd. € |
| 
 | 20 |  | 2021 | 575 Tsd. € |
| 
 | 32 |  | 2021 | 550 Tsd. € |
|  | 29 |  | 2021 | 550 Tsd. € |
|  | 22 |  | 2021 | 550 Tsd. € |
| 
 | 23 |  | 2022 | 550 Tsd. € |
|  | 30 |  | 2022 | 550 Tsd. € |
|  | 23 |  | 2023 | 500 Tsd. € |
|  | 28 |  | 2023 | 500 Tsd. € |
|  | 31 |  | 2022 | 500 Tsd. € |
| 
 | 26 |  | 2021 | 500 Tsd. € |
|  | 28 |  | 2021 | 500 Tsd. € |
| 
 | 24 |  | 2022 | 500 Tsd. € |
|  | 26 |  | 2022 | 500 Tsd. € |
|  | 28 |  | 2025 | 500 Tsd. € |
|  | 28 |  | 2022 | 500 Tsd. € |
|  | 33 |  | - | 500 Tsd. € |
|  | 27 |  | 2021 | 500 Tsd. € |
|  | 30 |  | 2021 | 500 Tsd. € |
| 
 | 19 |  | - | 500 Tsd. € |
|  | 21 |  | 2024 | 500 Tsd. € |
|  | 26 |  | 2021 | 450 Tsd. € |
|  | 23 |  | - | 450 Tsd. € |
|  | 25 |  | 2023 | 450 Tsd. € |
|  | 27 |  | 2021 | 425 Tsd. € |
|  | 24 |  | 2024 | 400 Tsd. € |
| 
 | 27 |  | - | 400 Tsd. € |
| 
 | 21 |  | 2021 | 400 Tsd. € |
|  | 19 |  | 2021 | 400 Tsd. € |
|  | 24 |  | 2021 | 400 Tsd. € |
|  | 30 |  | 2024 | 400 Tsd. € |
| 
 | 20 |  | 2021 | 400 Tsd. € |
| 
 | 29 |  | 2022 | 400 Tsd. € |
|  | 26 |  | 2022 | 400 Tsd. € |
|  | 21 |  | 2024 | 400 Tsd. € |
|  | 22 |  | 2022 | 400 Tsd. € |
|  | 21 |  | 2021 | 400 Tsd. € |
|  | 26 |  | 2022 | 400 Tsd. € |
|  | 24 |  | 2022 | 400 Tsd. € |
|  | 25 |  | 2024 | 400 Tsd. € |
|  | 23 |  | 2023 | 400 Tsd. € |
| 
 | 19 |  | 2022 | 400 Tsd. € |
|  | 21 |  | 2024 | 400 Tsd. € |
| 
 | 22 |  | 2021 | 375 Tsd. € |
|  | 19 |  | 2023 | 350 Tsd. € |
|  | 25 |  | 2023 | 350 Tsd. € |
|  | 20 |  | 2023 | 350 Tsd. € |
|  | 28 |  | - | 350 Tsd. € |
|  | 21 |  | 2021 | 350 Tsd. € |
|  | 32 |  | 2022 | 350 Tsd. € |
|  | 28 |  | 2022 | 350 Tsd. € |
|  | 20 |  | 2024 | 350 Tsd. € |
|  | 26 |  | 2022 | 350 Tsd. € |
|  | 29 |  | 2024 | 350 Tsd. € |
|  | 27 |  | 2021 | 350 Tsd. € |
|  | 19 |  | 2021 | 325 Tsd. € |
|  | 28 |  | 2022 | 325 Tsd. € |
|  | 32 |  | 2021 | 325 Tsd. € |
| 
 | 27 |  | 2022 | 300 Tsd. € |
| 
 | 28 |  | 2023 | 300 Tsd. € |
|  | 28 |  | 2021 | 300 Tsd. € |
| 
 | 28 |  | - | 300 Tsd. € |
|  | 27 |  | 2021 | 300 Tsd. € |
|  | 26 |  | - | 300 Tsd. € |
|  | 26 |  | - | 300 Tsd. € |
|  | 32 |  | 2021 | 300 Tsd. € |
|  | 27 |  | 2022 | 275 Tsd. € |
|  | 26 |  | 2022 | 275 Tsd. € |
|  | 22 |  | 2021 | 250 Tsd. € |
|  | 28 |  | 2023 | 250 Tsd. € |
| 
 | 27 |  | 2022 | 250 Tsd. € |
|  | 19 |  | 2021 | 250 Tsd. € |
|  | 20 |  | - | 250 Tsd. € |
|  | 18 |  | 2025 | 250 Tsd. € |
|  | 23 |  | 2023 | 250 Tsd. € |
|  | 20 |  | 2021 | 250 Tsd. € |
|  | 22 |  | 2023 | 225 Tsd. € |
| 
 | 22 |  | 2021 | 200 Tsd. € |
|  | 18 |  | 2022 | 200 Tsd. € |
|  | 18 |  | 2022 | 200 Tsd. € |
|  | 21 |  | 2021 | 200 Tsd. € |
|  | 33 |  | 2021 | 200 Tsd. € |
|  | 20 |  | 2021 | 200 Tsd. € |
|  | 22 |  | 2021 | 200 Tsd. € |
|  | 32 |  | 2021 | 200 Tsd. € |
|  | 21 |  | 2022 | 200 Tsd. € |
|  | 20 |  | - | 200 Tsd. € |
| 
 | 20 |  | 2021 | 200 Tsd. € |
|  | 27 |  | 2021 | 200 Tsd. € |
|  | 23 |  | 2021 | 175 Tsd. € |
|  | 23 |  | 2023 | 175 Tsd. € |
|  | 19 |  | 2021 | 150 Tsd. € |
|  | 20 |  | 2022 | 150 Tsd. € |
|  | 22 |  | 2021 | 150 Tsd. € |
|  | 18 |  | 2021 | 150 Tsd. € |
|  | 20 |  | 2022 | 150 Tsd. € |
|  | 20 |  | 2023 | 150 Tsd. € |
|  | 21 |  | 2021 | 125 Tsd. € |
| 
 | 20 |  | 2022 | 100 Tsd. € |
| 
 | 19 |  | 2023 | 100 Tsd. € |
|  | 24 |  | - | 100 Tsd. € |
|  | 19 |  | 2022 | 100 Tsd. € |
|  | 25 |  | - | 100 Tsd. € |
|  | 21 |  | 2021 | 100 Tsd. € |
|  | 19 |  | 2021 | 100 Tsd. € |
|  | 19 |  | 2022 | 75 Tsd. € |
|  | 19 |  | 2022 | 75 Tsd. € |
|  | 20 |  | 2022 | 75 Tsd. € |
|  | 20 |  | 2021 | 75 Tsd. € |
|  | 26 |  | - | 75 Tsd. € |
|  | 21 |  | 2021 | 75 Tsd. € |
|  | 20 |  | - | 50 Tsd. € |
|  | 23 |  | - | 50 Tsd. € |
|  | 18 |  | 2025 | 50 Tsd. € |
|  | 25 |  | 2021 | 50 Tsd. € |
|  | 19 |  | - | 50 Tsd. € |
|  | 21 |  | 2021 | 50 Tsd. € |
|  | 18 |  | 2023 | 50 Tsd. € |
| 
 | 23 |  | 2021 | 50 Tsd. € |
|  | 21 |  | 2021 | 50 Tsd. € |
|  | 19 |  | 2021 | 50 Tsd. € |
|  | 20 |  | - | 50 Tsd. € |
|  | 20 |  | 2021 | 25 Tsd. € |
|  | 20 |  | - | 25 Tsd. € |
|  | 19 |  | - | 25 Tsd. € |
|  | 20 |  | 2021 | 25 Tsd. € |
|  | 37 |  | - | - |
| 
 | 24 |  | - | - |
|  | 22 |  | 2021 | - |
|  | 21 |  | 2022 | - |
|  | 30 |  | 2022 | - |
|  | 33 |  | - | - |
|  | 36 |  | - | - |
|  | 30 |  | - | - |
|  | 19 |  | 2023 | - |
|  | 23 |  | 2021 | - |
|  | 21 |  | 2021 | - |
|  | 19 |  | 2021 | - |
|  | 20 |  | 2021 | - |
|  | 20 |  | 2021 | - |
|  | 18 |  | 2021 | - |
|  | 18 |  | 2021 | - |
| 
 | 21 |  | 2021 | - |
| 
 | 19 |  | - | - |
|  | 19 |  | - | - |
|  | 20 |  | - | - |
|  | 18 |  | 2021 | - |
|  | 19 |  | 2021 | - |
|  | 18 |  | - | - |
| 
 | 18 |  | 2022 | - |
|  | 18 |  | - | - |
|  | 19 |  | - | - |
|  | 20 |  | 2021 | - |
|  | 19 |  | 2023 | - |
|  | 18 |  | - | - |
|  | 18 |  | - | - |
| 
 | 18 |  | - | - |
|  | 18 |  | - | - |
|  | 20 |  | 2021 | - |
|  | 23 |  | 2021 | - |
|  | 19 |  | 2022 | - |
| 
 | 20 |  | 2021 | - |
|  | 20 |  | - | - |
|  | 18 |  | - | - |
| 
 | 18 |  | 2022 | - |
|  | 20 |  | 2022 | - |
|  | 19 |  | 2022 | - |
|  | 18 |  | - | - |
|  | 19 |  | 2021 | - |
|  | 19 |  | 2022 | - |
|  | 19 |  | - | - |
|  | 19 |  | - | - |
|  | 21 |  | - | - |
|  | 19 |  | - | - |
|  | 18 |  | - | - |