|  | 24 |  | - | 800 Tsd. € |
| | 30 |  | 2022 | 800 Tsd. € |
| | 31 | | 2022 | 700 Tsd. € |
| | 24 |  | - | 600 Tsd. € |
| | 32 | | - | 500 Tsd. € |
|  | 20 |  | 2021 | 500 Tsd. € |
| | 28 | | - | 450 Tsd. € |
| | 28 | | - | 400 Tsd. € |
| | 24 |  | 2021 | 350 Tsd. € |
| | 31 |  | - | 350 Tsd. € |
|
 | 32 | | - | 300 Tsd. € |
|  | 24 |  | - | 300 Tsd. € |
| | 29 | | - | 250 Tsd. € |
| | 27 | | 2021 | 250 Tsd. € |
| | 23 | | 2021 | 250 Tsd. € |
| | 19 | | 2021 | 200 Tsd. € |
| | 32 | | - | 200 Tsd. € |
| | 20 |  | 2021 | 200 Tsd. € |
| | 24 |  | 2020 | 150 Tsd. € |
| | 28 |  | 2020 | 150 Tsd. € |
| | 35 | | - | 150 Tsd. € |
| | 30 | | - | 100 Tsd. € |
| | 28 |  | 2020 | 100 Tsd. € |
|  | 29 |  | 2020 | 100 Tsd. € |
| | 26 | | 2020 | 100 Tsd. € |
| | 20 | | - | 100 Tsd. € |
| | 20 | | 2019 | 100 Tsd. € |
| | 33 | | 2020 | 100 Tsd. € |
| | 20 | | 2021 | 100 Tsd. € |
| 
| 33 |  | 2020 | 75 Tsd. € |
| | 25 | | - | 50 Tsd. € |
| | 38 | | 2020 | 50 Tsd. € |
| | 33 | | - | 50 Tsd. € |
| | 37 |  | 2020 | 25 Tsd. € |
| | 37 |  | - | - |
| | 28 |  | - | - |
