| 
 | 26 |  | 2023 | 65,00 Mio. € |
| | 24 |  | 2021 | 25,00 Mio. € |
|
 | 18 |  | 2025 | 2,50 Mio. € |
|  | 25 |  | 2021 | 2,20 Mio. € |
|
 | 30 |  | 2022 | 1,80 Mio. € |
| | 23 |  | 2021 | 1,50 Mio. € |
|  | 18 |  | 2024 | 1,50 Mio. € |
|
| 27 |  | 2023 | 800 Tsd. € |
| | 21 |  | 2021 | 700 Tsd. € |
| | 29 | | 2022 | 400 Tsd. € |
| | 24 |  | 2021 | 400 Tsd. € |
| 
 | 19 |  | 2022 | 300 Tsd. € |
|
| 27 |  | - | 300 Tsd. € |
| | 27 |  | 2021 | 250 Tsd. € |
| | 27 |  | 2022 | 250 Tsd. € |
|
| 32 |  | 2021 | 200 Tsd. € |
| | 25 |  | 2022 | 200 Tsd. € |
| | 24 |  | 2022 | 200 Tsd. € |
| | 25 |  | 2022 | 150 Tsd. € |
| | 21 |  | 2021 | 150 Tsd. € |
|
| 21 |  | - | 150 Tsd. € |
| | 27 |  | 2022 | 150 Tsd. € |
| | 20 | | 2021 | 100 Tsd. € |
| 
| 19 |  | 2023 | 100 Tsd. € |
| | 18 |  | 2022 | 100 Tsd. € |
| | 19 | | 2023 | 100 Tsd. € |
| | 19 |  | 2021 | 100 Tsd. € |
|
| 20 |  | 2022 | 75 Tsd. € |
| | 19 |  | - | 75 Tsd. € |
| | 19 |  | - | 75 Tsd. € |
| | 18 | | 2023 | 50 Tsd. € |
| 
| 20 |  | - | 50 Tsd. € |
| | 20 |  | 2021 | 25 Tsd. € |
| | 19 |  | - | - |
|  | 18 |  | - | - |
| | 20 |  | 2021 | - |
| | 19 |  | 2021 | - |
| | 19 |  | 2021 | - |
| | 20 |  | 2022 | - |
| | 19 |  | 2021 | - |
| | 20 | | - | - |
| | 19 |  | 2022 | - |
