|  | 26 |  | 2021 | 10,00 Mio. € |
| | 30 |  | 2022 | 5,50 Mio. € |
| | 32 |  | 2022 | 2,00 Mio. € |
| | 24 |  | 2022 | 1,60 Mio. € |
| | 30 |  | 2022 | 1,50 Mio. € |
| | 26 |  | 2022 | 1,10 Mio. € |
| | 29 |  | 2022 | 850 Tsd. € |
| | 28 |  | 2022 | 800 Tsd. € |
| | 26 |  | 2021 | 800 Tsd. € |
| | 25 |  | 2022 | 750 Tsd. € |
| | 31 |  | 2022 | 650 Tsd. € |
| | 32 |  | 2022 | 600 Tsd. € |
| | 25 | | 2022 | 600 Tsd. € |
| | 28 |  | 2022 | 600 Tsd. € |
| | 23 |  | 2022 | 500 Tsd. € |
| | 34 |  | 2022 | 500 Tsd. € |
| | 29 |  | 2022 | 500 Tsd. € |
| | 30 |  | 2022 | 450 Tsd. € |
| | 28 |  | 2022 | 450 Tsd. € |
| | 23 | | 2022 | 400 Tsd. € |
| | 27 | | 2022 | 400 Tsd. € |
| | 28 |  | 2022 | 400 Tsd. € |
| | 25 |  | 2022 | 350 Tsd. € |
| | 33 |  | - | 300 Tsd. € |
| | 35 |  | 2022 | 300 Tsd. € |
| | 31 | | 2022 | 300 Tsd. € |
| | 30 |  | 2022 | 300 Tsd. € |
| | 26 |  | 2022 | 300 Tsd. € |
| | 27 |  | 2022 | 300 Tsd. € |
| | 19 |  | 2023 | 300 Tsd. € |
| | 32 |  | 2022 | 250 Tsd. € |
| | 28 |  | 2022 | 250 Tsd. € |
| | 22 |  | 2022 | 200 Tsd. € |
| | 21 |  | 2022 | 150 Tsd. € |
| | 26 |  | 2022 | 125 Tsd. € |
| | 26 |  | 2022 | 125 Tsd. € |
| | 28 |  | - | 100 Tsd. € |
| | 41 | | 2022 | 25 Tsd. € |
| | 26 |  | 2022 | 25 Tsd. € |
| | 33 |  | - | - |
| | 48 | | - | - |
| | 26 |  | - | - |
| | 32 |  | - | - |
| | 41 | | - | - |
| | 38 | | - | - |
| | 39 |  | 2022 | - |
| | 32 | | - | - |
| | 32 | | - | - |
| | 38 | | - | - |
| | 38 | | 2022 | - |
| | 41 | | - | - |
| | 42 | | - | - |
| | 27 | | - | - |
| | 41 | | - | - |
