|  | 26 |  | 2021 | 10,00 Mio. € |
|  | 30 |  | 2022 | 5,50 Mio. € |
|  | 32 |  | 2022 | 2,00 Mio. € |
|  | 24 |  | 2022 | 1,60 Mio. € |
|  | 30 |  | 2022 | 1,50 Mio. € |
|  | 26 |  | 2022 | 1,10 Mio. € |
|  | 29 |  | 2022 | 850 Tsd. € |
|  | 28 |  | 2022 | 800 Tsd. € |
|  | 26 |  | 2021 | 800 Tsd. € |
|  | 25 |  | 2022 | 750 Tsd. € |
|  | 31 |  | 2022 | 650 Tsd. € |
|  | 32 |  | 2022 | 600 Tsd. € |
|  | 25 |  | 2022 | 600 Tsd. € |
|  | 28 |  | 2022 | 600 Tsd. € |
|  | 23 |  | 2022 | 500 Tsd. € |
|  | 34 |  | 2022 | 500 Tsd. € |
|  | 29 |  | 2022 | 500 Tsd. € |
|  | 30 |  | 2022 | 450 Tsd. € |
|  | 28 |  | 2022 | 450 Tsd. € |
|  | 23 |  | 2022 | 400 Tsd. € |
|  | 27 |  | 2022 | 400 Tsd. € |
|  | 28 |  | 2022 | 400 Tsd. € |
|  | 25 |  | 2022 | 350 Tsd. € |
|  | 33 |  | - | 300 Tsd. € |
|  | 35 |  | 2022 | 300 Tsd. € |
|  | 31 |  | 2022 | 300 Tsd. € |
|  | 30 |  | 2022 | 300 Tsd. € |
|  | 26 |  | 2022 | 300 Tsd. € |
|  | 27 |  | 2022 | 300 Tsd. € |
|  | 19 |  | 2023 | 300 Tsd. € |
|  | 32 |  | 2022 | 250 Tsd. € |
|  | 28 |  | 2022 | 250 Tsd. € |
|  | 22 |  | 2022 | 200 Tsd. € |
|  | 21 |  | 2022 | 150 Tsd. € |
|  | 26 |  | 2022 | 125 Tsd. € |
|  | 26 |  | 2022 | 125 Tsd. € |
|  | 28 |  | - | 100 Tsd. € |
|  | 41 |  | 2022 | 25 Tsd. € |
|  | 26 |  | 2022 | 25 Tsd. € |
|  | 33 |  | - | - |
|  | 48 |  | - | - |
|  | 26 |  | - | - |
|  | 32 |  | - | - |
|  | 41 |  | - | - |
|  | 38 |  | - | - |
|  | 39 |  | 2022 | - |
|  | 32 |  | - | - |
|  | 32 |  | - | - |
|  | 38 |  | - | - |
|  | 38 |  | 2022 | - |
|  | 41 |  | - | - |
|  | 42 |  | - | - |
|  | 27 |  | - | - |
|  | 41 |  | - | - |