| 
 | 28 |  | 2022 | 17,50 Mio. € |
| | 26 |  | 2023 | 4,00 Mio. € |
| | 30 |  | 2021 | 2,00 Mio. € |
| | 18 |  | 2023 | 1,80 Mio. € |
| | 24 |  | 2022 | 1,60 Mio. € |
| | 31 |  | 2022 | 1,20 Mio. € |
| 
| 21 |  | 2023 | 1,10 Mio. € |
| | 22 |  | 2022 | 800 Tsd. € |
| | 29 |  | 2020 | 800 Tsd. € |
| 
| 28 |  | 2020 | 800 Tsd. € |
| | 28 |  | 2022 | 800 Tsd. € |
|  | 23 | | 2021 | 725 Tsd. € |
| | 29 |  | 2020 | 550 Tsd. € |
| | 21 |  | 2021 | 525 Tsd. € |
| | 25 |  | 2022 | 475 Tsd. € |
| | 20 |  | 2023 | 450 Tsd. € |
| | 28 |  | 2023 | 400 Tsd. € |
| | 31 | | 2020 | 400 Tsd. € |
| | 36 |  | 2021 | 400 Tsd. € |
| | 23 |  | 2022 | 400 Tsd. € |
| | 19 | | 2023 | 350 Tsd. € |
| | 20 | | 2021 | 350 Tsd. € |
| | 27 |  | 2022 | 350 Tsd. € |
| | 20 |  | 2023 | 350 Tsd. € |
| | 21 | | 2023 | 325 Tsd. € |
| | 23 | | 2021 | 325 Tsd. € |
| | 26 | | 2022 | 325 Tsd. € |
| | 27 |  | 2021 | 325 Tsd. € |
| | 27 |  | 2020 | 300 Tsd. € |
| | 28 |  | 2022 | 300 Tsd. € |
| | 26 | | 2021 | 300 Tsd. € |
| | 24 | | 2021 | 300 Tsd. € |
| | 24 |  | 2021 | 300 Tsd. € |
| | 20 |  | 2022 | 300 Tsd. € |
| | 23 | | 2022 | 250 Tsd. € |
| | 20 |  | 2022 | 250 Tsd. € |
| | 24 |  | 2020 | 200 Tsd. € |
| | 21 |  | 2021 | 200 Tsd. € |
| | 19 | | 2020 | 150 Tsd. € |
| | 19 | | 2023 | 150 Tsd. € |
| | 20 | | 2021 | 100 Tsd. € |
| | 33 | | 2020 | 100 Tsd. € |
| | 22 |  | 2023 | 100 Tsd. € |
| | 20 |  | 2021 | 50 Tsd. € |
| | 22 | | 2021 | 50 Tsd. € |
| | 18 |  | 2022 | 50 Tsd. € |
| | 19 | | 2022 | 50 Tsd. € |
| | 19 |  | 2023 | 50 Tsd. € |
| | 19 |  | 2021 | 25 Tsd. € |
| | 32 |  | - | - |
| | 20 |  | 2022 | - |
| | 19 |  | 2021 | - |
| | 18 | | 2020 | - |
| | 18 | | 2022 | - |
| | 19 |  | 2020 | - |
|
 | 19 |  | 2020 | - |
