| 
 | 29 |  | 2022 | 17,50 Mio. € |
| | 22 |  | 2025 | 4,50 Mio. € |
| | 25 |  | 2022 | 3,50 Mio. € |
| | 27 | | 2021 | 3,50 Mio. € |
| | 22 |  | 2023 | 2,50 Mio. € |
| | 31 | | 2021 | 2,00 Mio. € |
| | 19 |  | 2023 | 2,00 Mio. € |
| 
| 29 |  | 2022 | 800 Tsd. € |
| | 30 |  | 2024 | 700 Tsd. € |
| | 21 | | 2021 | 700 Tsd. € |
|  | 24 | | 2021 | 700 Tsd. € |
| | 24 |  | 2022 | 700 Tsd. € |
| | 23 |  | 2022 | 600 Tsd. € |
| | 21 |  | 2023 | 600 Tsd. € |
| | 29 |  | 2022 | 600 Tsd. € |
| | 32 | | 2022 | 500 Tsd. € |
| | 20 | | 2023 | 500 Tsd. € |
| | 30 |  | 2022 | 500 Tsd. € |
| | 23 |  | 2022 | 500 Tsd. € |
| | 28 |  | 2022 | 450 Tsd. € |
| | 21 |  | 2021 | 450 Tsd. € |
| | 23 |  | 2022 | 400 Tsd. € |
| | 23 | | 2022 | 400 Tsd. € |
| | 20 | | 2023 | 400 Tsd. € |
| | 20 | | 2022 | 400 Tsd. € |
| | 28 |  | 2023 | 375 Tsd. € |
| | 27 |  | 2022 | 350 Tsd. € |
| | 20 | | 2023 | 350 Tsd. € |
|
 | 31 | | 2022 | 350 Tsd. € |
|
 | 25 |  | 2023 | 350 Tsd. € |
| | 29 | | 2023 | 300 Tsd. € |
|  | 28 |  | 2023 | 300 Tsd. € |
| | 27 | | 2022 | 300 Tsd. € |
| | 25 | | 2021 | 300 Tsd. € |
| | 28 | | 2021 | 300 Tsd. € |
| | 37 |  | 2021 | 300 Tsd. € |
| | 21 |  | 2023 | 300 Tsd. € |
| | 20 | | 2023 | 250 Tsd. € |
| | 24 | | 2022 | 250 Tsd. € |
| | 20 | | 2021 | 250 Tsd. € |
| | 18 |  | 2022 | 250 Tsd. € |
| | 28 |  | 2022 | 250 Tsd. € |
| | 21 | | 2021 | 225 Tsd. € |
| | 22 |  | 2021 | 200 Tsd. € |
| | 21 |  | 2021 | 100 Tsd. € |
| | 20 |  | 2021 | 100 Tsd. € |
| | 19 | | 2023 | 50 Tsd. € |
| | 20 |  | 2021 | 25 Tsd. € |
| | 18 |  | 2022 | - |
| | 19 |  | 2021 | - |
| | 18 | | 2021 | - |
| | 19 |  | 2022 | - |
|  | 19 | | 2025 | - |
| | 18 |  | 2023 | - |
