|  | 23 |  | 2024 | 4,50 Mio. € |
|  | 24 |  | 2023 | 3,50 Mio. € |
|  | 28 |  | 2022 | 3,00 Mio. € |
|  | 26 |  | 2022 | 2,20 Mio. € |
|  | 27 |  | 2023 | 1,80 Mio. € |
| 
 | 29 |  | 2022 | 1,80 Mio. € |
|  | 30 |  | - | 1,50 Mio. € |
|  | 34 |  | 2021 | 1,30 Mio. € |
|  | 23 |  | 2020 | 1,20 Mio. € |
|  | 32 |  | 2022 | 950 Tsd. € |
| 
 | 34 |  | - | 700 Tsd. € |
| 
 | 29 |  | - | 650 Tsd. € |
|  | 24 |  | - | 550 Tsd. € |
|  | 26 |  | - | 500 Tsd. € |
|  | 21 |  | 2021 | 500 Tsd. € |
| 
 | 22 |  | - | 450 Tsd. € |
| 
 | 26 |  | 2021 | 450 Tsd. € |
|  | 24 |  | - | 450 Tsd. € |
|  | 30 |  | 2021 | 400 Tsd. € |
|  | 29 |  | - | 350 Tsd. € |
|  | 20 |  | 2021 | 300 Tsd. € |
|  | 22 |  | 2023 | 300 Tsd. € |
|  | 22 |  | - | 300 Tsd. € |
|  | 21 |  | 2020 | 300 Tsd. € |
|  | 25 |  | - | 300 Tsd. € |
|  | 25 |  | - | 250 Tsd. € |
|  | 21 |  | 2021 | 200 Tsd. € |
|  | 21 |  | - | 200 Tsd. € |
|  | 20 |  | - | 200 Tsd. € |
|  | 23 |  | - | 200 Tsd. € |
|  | 22 |  | 2021 | 150 Tsd. € |
|  | 22 |  | - | 150 Tsd. € |
|  | 26 |  | - | 150 Tsd. € |
|  | 22 |  | - | 150 Tsd. € |
|  | 22 |  | - | 100 Tsd. € |
|  | 23 |  | - | 100 Tsd. € |
|  | 20 |  | 2021 | 100 Tsd. € |
|  | 21 |  | - | 75 Tsd. € |
| 
 | 20 |  | - | 50 Tsd. € |
|  | 21 |  | 2022 | 50 Tsd. € |
|  | 19 |  | - | 50 Tsd. € |
|  | 21 |  | - | 50 Tsd. € |
|  | 20 |  | - | 50 Tsd. € |
|  | 21 |  | - | 50 Tsd. € |
|  | 18 |  | - | 50 Tsd. € |
|  | 19 |  | - | 50 Tsd. € |
|  | 20 |  | - | 25 Tsd. € |
|  | 18 |  | - | 25 Tsd. € |
|  | 19 |  | - | 25 Tsd. € |
|  | 19 |  | - | 25 Tsd. € |
| 
 | 36 |  | - | - |
|  | 20 |  | - | - |
|  | 20 |  | - | - |
|  | 19 |  | - | - |
|  | 19 |  | 2024 | - |
|  | 18 |  | - | - |
|  | 18 |  | - | - |
|  | 20 |  | - | - |
|  | 18 |  | - | - |
|  | 18 |  | - | - |
|  | 19 |  | - | - |
|  | 18 |  | - | - |
|  | 18 |  | - | - |