|  | 23 |  | 2023 | 5,00 Mio. € |
| | 27 |  | 2022 | 4,80 Mio. € |
| | 23 |  | 2022 | 3,20 Mio. € |
|  | 30 |  | - | 2,00 Mio. € |
| | 26 |  | 2022 | 2,00 Mio. € |
|
 | 28 |  | 2022 | 2,00 Mio. € |
| | 27 |  | 2023 | 1,80 Mio. € |
| | 33 |  | 2021 | 1,70 Mio. € |
| | 23 |  | 2020 | 1,20 Mio. € |
| | 32 |  | 2022 | 950 Tsd. € |
|
| 34 |  | 2021 | 700 Tsd. € |
|
| 29 |  | - | 650 Tsd. € |
|
 | 26 |  | 2021 | 600 Tsd. € |
| | 24 |  | - | 550 Tsd. € |
| | 26 |  | - | 500 Tsd. € |
| | 20 | | 2021 | 500 Tsd. € |
|
| 22 |  | - | 450 Tsd. € |
| | 24 | | 2020 | 450 Tsd. € |
| | 22 | | 2023 | 400 Tsd. € |
| | 29 | | 2022 | 400 Tsd. € |
| | 29 |  | - | 350 Tsd. € |
| | 20 | | 2021 | 300 Tsd. € |
| | 22 | | - | 300 Tsd. € |
| | 21 | | 2020 | 300 Tsd. € |
| | 24 |  | - | 300 Tsd. € |
| | 25 |  | - | 250 Tsd. € |
| | 21 |  | 2020 | 200 Tsd. € |
| | 21 | | - | 200 Tsd. € |
| | 19 | | 2020 | 200 Tsd. € |
| | 23 |  | - | 200 Tsd. € |
| | 22 |  | 2021 | 150 Tsd. € |
| | 22 | | - | 150 Tsd. € |
| | 26 | | - | 150 Tsd. € |
| | 22 |  | - | 150 Tsd. € |
| | 22 | | - | 100 Tsd. € |
| | 23 | | - | 100 Tsd. € |
| | 20 |  | 2020 | 100 Tsd. € |
| | 20 | | 2020 | 75 Tsd. € |
|
| 20 | | 2020 | 50 Tsd. € |
| | 20 |  | 2022 | 50 Tsd. € |
| | 19 |  | - | 50 Tsd. € |
| | 21 | | - | 50 Tsd. € |
| | 20 | | - | 50 Tsd. € |
| | 21 | | - | 50 Tsd. € |
| | 18 | | - | 50 Tsd. € |
| | 18 |  | - | 50 Tsd. € |
| | 20 | | - | 25 Tsd. € |
| | 18 |  | - | 25 Tsd. € |
| | 19 | | - | 25 Tsd. € |
| | 18 | | - | 25 Tsd. € |
|
| 36 |  | - | - |
| | 20 | | - | - |
| | 20 |  | - | - |
| | 18 |  | - | - |
| | 18 |  | 2024 | - |
| | 18 |  | - | - |
| | 20 |  | - | - |
| | 18 | | - | - |
| | 18 | | - | - |
| | 19 | | - | - |
| | 18 |  | - | - |
